Yes I agree with other comments that the 3 bet pre-flop was too small. However, the flop bet was too small and he would be calling you with almost anything.
Villain could have been on a diamond draw, had an over pair to the board 10-10 thru QQ, but AQ also definitely in his range here. Though he could be bluffing the Ace, it just seems unlikely. He could be betting a set hoping the Ace helped you, but I think Ax seem like a strong possibility here.
Being deep stacked, and with 3 other callers in the hand, the three bet should have been much more aggressive. You also want to deny him the correct implied
odds to hit a set. I have no problem here making it 25k to go and jamming the flop. Most of the time you will just take the hand down, and anyone calling is mathematically making a mistake. And you definitely don't want two callers here.