As far as ITM% goes, a good par point would be the % of players paid out. For example, if the site you play on pays the top 10%, then that's a good base line. If you're ITM 10% of the time, you're on par.
However, another factor would be how you approach the money bubbles. If your goal is to sneak into the money, then you'll probably have a much higher ITM%, but a much lower ROI%. These are usually players who will fold and get chipped down and by the time they are ITM, they're down 10BBs or less and can't recover.
If your strategy is to take risks at the mid-late stages for a bigger stack in late stages/final table, but at the risk of not not finishing ITM, your ITM% will be much lower, but you'll have a better ROI% (assuming you're making FTs and winning).
A perfect example of this is Chris Moorman. His ITM% might look low at 12% on FTP, but his ROI% is very high because he's not trying to just min-cash. He sets himself up to win. Lets say he plays 50 MTTs, he might bust out of 49 MTTs right before the money take risk in 50-50, 40-60 situations, but on the 50th one, he wins and it propels him to take 1st, which is a much better ROI than just making 49 min-cashes.